PETALUMA, Calif.-Tegal Corp. said RF Micro Devices Inc. placed a follow-on order for Tegal’s 901G diode plasma etcher.
The tool will be used for etching devices on gallium arsenide substrates-widely used in cellular phones and other wireless communications products-at RF Micro Devices’ North Carolina manufacturing facility, said Tegal.
“The 901G has been configured with special sensors and electrode designs to address the unique demands of this material,” said Jim McKibben, Tegal’s vice president of worldwide sales. “A repeat order from RF Micro Devices is proof of the company’s confidence in Tegal’s abilities to supply them with the most flexible etching system available for GaAs substrates.”
